DUSTY PLASMA DEPOSITION OF NANOCOMPOSITE THIN FILMS

NALAGANJE NANOKOMPOZITNIH TANKIH PLASTI S PRAŠNO PLAZMO

Aleksander Drenik1, Richard Clergereaux2

1Center of Excellence for Polymer Materials and Technologies, Tehnološki park 24, 1000 Ljubljana, Slovenia
2UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d'Energie), Université de Toulouse, 118 route de Narbonne, F-31062 Toulouse cedex 9, France

[email protected]

Prejem rokopisa – received: 2011-07-15; sprejem za objavo – accepted for publication: 2011-08-03

Dusty plasma has traditionally been considered as pollutant species in plasma processes. However, lately it is being regarded as an interesting way of producing nanocomposite thin films. In this paper, the basics of dusty plasma physics are presented. Discussed is the nucleation and growth, which can be either a consequence of homogeneous plasma reactions, heterogeneous reactions on the plasma-surface interface or they can be injected externally into the plasma. The particles are negatively charged, which strongly influences their movement. The most important interaction is the repelling force in the plasma sheath which confines the particles to the plasma volume. Also presented in this paper are the basic properties of nanocomposite thin films and their application in modern technological and industrial applications. Examples of dusty plasma produced nanocomposite thin films are given in the final chapter.

Keywords: dusty plasma, nanocomposite thin films

Navadno so pojav prašne plazme v plazemskih reaktorjih povezovali z nečistočami v plazmi, zadnja leta pa jih dojemajo tudi kot zanimivo orodje za nalaganje nanokompozitnih tankih plasti. V pričujočem prispevku predstavljamo osnove fizike prašnih plazem. Govora je o nukleaciji in rasti, ki je lahko posledica homogenih reakcij v prostornini plazme, posledica heterogenih reakcij na stični plasti med plazmo in trdno površino, ali pa so lahko vstavljeni v plazmo od zunaj. Delci imajo negativen električni naboj, kar močno vpliva na njihovo gibanje. Najpomembnejša interakcija je odbojna sila v plašču plazme, ki zadržuje delce v prostornini plazme. V prispevku so pravtako predstavljene osnovne lastnosti nanokompozitnih tankih plasti in njihove uporabe v sodobnih tehnoloških in industrijskih aplikacijah. V zadnjem poglavju so predstavljeni primeri nanokompozitnih tankih plasti, pripravljeni s pomočjo prašne plazme.

Ključne besede: prašna plazma, nanokompozitne tanke plasti